Experimental study of micromilling process and deburring electropolishing process on FeCo-based soft magnetic alloys

Abstract FeCo-based soft magnetic alloys are commonly used in macroscale devices to improve its electromagnetic performance, whereas they have been barely the microscale. Current FeCo alloy micromanufacturing processes present some difficulties like low structural strength, oxidation at high temperature processes, stoichiometry mismatches deposition and tough workability. In this work, a microcutting of FeCo-2 V-based process is presented described as an alternative method obtain microparts with properties good geometrical finish. The results machining analysed by varying parameters such depth cut, tool diameter, rotation speed feed on simple operations. study has done for 50-μm-diameter endmill 250-μm-diameter tools. It concludes that roughness minimized when parameter combination 0.24 mm/min rate 8 μm cut size tool, while selected mm/min, between 2 4 μm. An automated precision 3-axis CNC station used. Shapes needed actuators angular slots, disks, or slender square geometries shown work excellent mechanical properties. Additionally, complementary electropolishing described. This helps eliminate burr edges residuals milling operation. demonstrates micromilling can be microfabrication V components, suitable microassemblies MEMS.